Effect of Wet Expansion Behavior on Polyimide Membrane Diffractive Lens
Abstract
:1. Introduction
2. Results and Discussion
3. Conclusions
Author Contributions
Funding
Conflicts of Interest
References
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Process Steps | Parameters | Humidity |
---|---|---|
Photoresist | AZ3100, 2000 rpm, 60 s | 40%–60% |
Soft bake | 100 °C, 5 min | 10%–20% |
Exposure | 4.5 mW/cm2, 20 s | 40%–60% |
Development | 5% TMAH, 30 s | 100% |
Hard bake | 120 °C, 5 min | 10%–20% |
Dry etching | O2, 30 sccm, 1 Pa, 100 W, 5 min | 0% |
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Gao, G.; Mao, D.; Fan, B.; Guan, C. Effect of Wet Expansion Behavior on Polyimide Membrane Diffractive Lens. Coatings 2019, 9, 559. https://doi.org/10.3390/coatings9090559
Gao G, Mao D, Fan B, Guan C. Effect of Wet Expansion Behavior on Polyimide Membrane Diffractive Lens. Coatings. 2019; 9(9):559. https://doi.org/10.3390/coatings9090559
Chicago/Turabian StyleGao, Guohan, Danbo Mao, Bin Fan, and Chunlin Guan. 2019. "Effect of Wet Expansion Behavior on Polyimide Membrane Diffractive Lens" Coatings 9, no. 9: 559. https://doi.org/10.3390/coatings9090559