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Journal: CoatingsVolume: 9Number: 645
Article: The Effect of RF Sputtering Conditions on the Physical Characteristics of Deposited GeGaN Thin Film
- Authors:
- Cao Phuong Thao1,
- Dong-Hau Kuo2,* and
- Thi Tran Anh Tuan3,*
- et al.
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