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Journal: Coatings, 2018
Volume: 8
Number: 373

Article: Preparation and Characterization of Sprayed-Yttrium Oxyfluoride Corrosion Protective Coating for Plasma Process Chambers
Authors: by Tzu-Ken Lin, Dong-Sing Wuu, Shih-Yung Huang and Wei-Kai Wang
Link: https://www.mdpi.com/2079-6412/8/10/373

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