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Journal: CoatingsVolume: 15Number: 1397
Article: Preparation and Properties of Plasma Etching-Resistant Y2O3 Films
  • Authors:
  • Rui Zhang1,
  • Jiaxing Peng1 and
  • Xiaobo Zhang2
  • et al.
Link: https://www.mdpi.com/2079-6412/15/12/1397

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