Anti-Corrosion SiOx-Doped DLC Coating for Raster Steel Linear Scales
Abstract
1. Introduction
2. Materials and Methods
3. Results and Discussion
4. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Conflicts of Interest
References
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Substrate | Stainless Steel |
---|---|
Reagents | Hexamethyldisiloxane (C6H18Si2O) + H2 |
Base pressure | 2 × 10−4 Pa |
Work pressure | 2 × 10−2 Pa |
Ion beam energy | 1000 eV |
Ion beam current density | 50 μA/cm2 |
Deposition time | 10 min |
O 1s | C 1s | Si 2p |
---|---|---|
27.27% | 52.29% | 20.44% |
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Lazauskas, A.; Grigaliūnas, V.; Jucius, D.; Meškinis, Š.; Andrulevičius, M.; Guobienė, A.; Vasiliauskas, A.; Kasparaitis, A. Anti-Corrosion SiOx-Doped DLC Coating for Raster Steel Linear Scales. Coatings 2024, 14, 818. https://doi.org/10.3390/coatings14070818
Lazauskas A, Grigaliūnas V, Jucius D, Meškinis Š, Andrulevičius M, Guobienė A, Vasiliauskas A, Kasparaitis A. Anti-Corrosion SiOx-Doped DLC Coating for Raster Steel Linear Scales. Coatings. 2024; 14(7):818. https://doi.org/10.3390/coatings14070818
Chicago/Turabian StyleLazauskas, Algirdas, Viktoras Grigaliūnas, Dalius Jucius, Šarūnas Meškinis, Mindaugas Andrulevičius, Asta Guobienė, Andrius Vasiliauskas, and Albinas Kasparaitis. 2024. "Anti-Corrosion SiOx-Doped DLC Coating for Raster Steel Linear Scales" Coatings 14, no. 7: 818. https://doi.org/10.3390/coatings14070818
APA StyleLazauskas, A., Grigaliūnas, V., Jucius, D., Meškinis, Š., Andrulevičius, M., Guobienė, A., Vasiliauskas, A., & Kasparaitis, A. (2024). Anti-Corrosion SiOx-Doped DLC Coating for Raster Steel Linear Scales. Coatings, 14(7), 818. https://doi.org/10.3390/coatings14070818