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Journal: Coatings, 2024
Volume: 14
Number: 724

Article: The Effect of Deposition Temperature on TiN Thin Films for the Electrode Layer of 3D Capacitors Prepared by Atomic Layer Deposition
Authors: by Xingyu Chen, Jing Zhang, Lingshan Gao, Faqiang Zhang, Mingsheng Ma and Zhifu Liu
Link: https://www.mdpi.com/2079-6412/14/6/724

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