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Journal: CoatingsVolume: 13Number: 1550
Article: Reactive Sputter Deposition of Ga2O3 Thin Films Using Liquid Ga Target
  • Authors:
  • Marcell Gajdics*,
  • Miklós Serényi and
  • Tamás Kolonits
  • et al.
Link: https://www.mdpi.com/2079-6412/13/9/1550

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