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Journal: Coatings, 2023
Volume: 13
Number: 2035
Article:
Modeling the Deposition of Thin Films of Transition Metal Nitrides
Authors:
by
Alexander Goncharov, Andrii Yunda, Ivan Kolinko, Grygoriy Kornich and Dmytro Shyrokorad
Link:
https://www.mdpi.com/2079-6412/13/12/2035
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