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Journal: CoatingsVolume: 12Number: 1308
Article: Reliability Enhancement of 14 nm HPC ASIC Using Al2O3 Thin Film Coated with Room-Temperature Atomic Layer Deposition
  • Authors:
  • Po-Chou Chen1,
  • Shu-Mei Chang1 and
  • Hao-Chung Kuo2
  • et al.
Link: https://www.mdpi.com/2079-6412/12/9/1308

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