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Journal: Coatings, 2022
Volume: 12
Number: 1308
Article:
Reliability Enhancement of 14 nm HPC ASIC Using Al2O3 Thin Film Coated with Room-Temperature Atomic Layer Deposition
Authors:
by
Po-Chou Chen, Shu-Mei Chang, Hao-Chung Kuo, Fu-Cheng Chang, Yu-An Li and Chao-Cheng Ting
Link:
https://www.mdpi.com/2079-6412/12/9/1308
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