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Journal: Coatings, 2022
Volume: 12
Number: 1711
Article:
Tunable Electrical Properties of Ti-B-N Thin Films Sputter-Deposited by the Reactive Gas Pulsing Process
Authors:
by
Charalampos Sakkas, Jean-Marc Cote, Joseph Gavoille, Jean-Yves Rauch, Pierre-Henri Cornuault, Anna Krystianiak, Olivier Heintz and Nicolas Martin
Link:
https://www.mdpi.com/2079-6412/12/11/1711
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