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Liang C, Zhong Y, Zhong Q, Li J, Cao W, Wang X, Wang S, Xu X, Wang J, Cao Y. Low-Temperature Deposition of High-Quality SiO₂ Films with a Sloped Sidewall Profile for Vertical Step Coverage. Coatings. 2022; 12(10):1411. https://doi.org/10.3390/coatings12101411

Liang, Congcong, Yuan Zhong, Qing Zhong, Jinjin Li, Wenhui Cao, Xueshen Wang, Shijian Wang, Xiaolong Xu, Jian Wang, and Yue Cao. 2022. "Low-Temperature Deposition of High-Quality SiO₂ Films with a Sloped Sidewall Profile for Vertical Step Coverage" Coatings 12, no. 10: 1411. https://doi.org/10.3390/coatings12101411

Liang, C., Zhong, Y., Zhong, Q., Li, J., Cao, W., Wang, X., Wang, S., Xu, X., Wang, J., & Cao, Y. (2022). Low-Temperature Deposition of High-Quality SiO₂ Films with a Sloped Sidewall Profile for Vertical Step Coverage. Coatings, 12(10), 1411. https://doi.org/10.3390/coatings12101411