Byeon, D.-S.;                     Cho, C.;                     Yoon, D.;                     Choi, Y.;                     Lee, K.;                     Baik, S.;                     Ko, D.-H.    
        Epitaxial Growth of Si and SiGe Using High-Order Silanes without a Carrier Gas at Low Temperatures via UHVCVD and LPCVD. Coatings 2021, 11, 568.
    https://doi.org/10.3390/coatings11050568
    AMA Style
    
                                Byeon D-S,                                 Cho C,                                 Yoon D,                                 Choi Y,                                 Lee K,                                 Baik S,                                 Ko D-H.        
                Epitaxial Growth of Si and SiGe Using High-Order Silanes without a Carrier Gas at Low Temperatures via UHVCVD and LPCVD. Coatings. 2021; 11(5):568.
        https://doi.org/10.3390/coatings11050568
    
    Chicago/Turabian Style
    
                                Byeon, Dae-Seop,                                 Choonghee Cho,                                 Dongmin Yoon,                                 Yongjoon Choi,                                 Kiseok Lee,                                 Seunghyun Baik,                                 and Dae-Hong Ko.        
                2021. "Epitaxial Growth of Si and SiGe Using High-Order Silanes without a Carrier Gas at Low Temperatures via UHVCVD and LPCVD" Coatings 11, no. 5: 568.
        https://doi.org/10.3390/coatings11050568
    
    APA Style
    
                                Byeon, D.-S.,                                 Cho, C.,                                 Yoon, D.,                                 Choi, Y.,                                 Lee, K.,                                 Baik, S.,                                 & Ko, D.-H.        
        
        (2021). Epitaxial Growth of Si and SiGe Using High-Order Silanes without a Carrier Gas at Low Temperatures via UHVCVD and LPCVD. Coatings, 11(5), 568.
        https://doi.org/10.3390/coatings11050568