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Journal: Coatings, 2021
Volume: 11
Number: 1449
Article:
Influence of Hydrogen-Nitrogen Hybrid Passivation on the Gate Oxide Film of n-Type 4H-SiC MOS Capacitors
Authors:
by
Yifan Jia, Shengjun Sun, Xiangtai Liu, Qin Lu, Ke Qin, Shaoqing Wang, Yunhe Guan, Haifeng Chen, Xiaoyan Tang and Yuming Zhang
Link:
https://www.mdpi.com/2079-6412/11/12/1449
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