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Journal: Coatings, 2021
Volume: 11
Number: 1151

Article: Fabrication of a 3.5-GHz Solidly Mounted Resonator by Using an AlScN Piezoelectric Thin Film
Authors: by Chan-Yu Chung, Ying-Chung Chen, Yu-Cheng Chen, Kuo-Sheng Kao and Yu-Chen Chang
Link: https://www.mdpi.com/2079-6412/11/10/1151

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