Chen, W.-C.; Chen, S.; Yu, T.-Y.; Su, J.; Chen, H.-P.; Lin, Y.-W.; Cheng, C.-P.
Growth of Si3N4 Thin Films on Si(111) Surface by RF-N2 Plasma Nitriding. Coatings 2021, 11, 2.
https://doi.org/10.3390/coatings11010002
AMA Style
Chen W-C, Chen S, Yu T-Y, Su J, Chen H-P, Lin Y-W, Cheng C-P.
Growth of Si3N4 Thin Films on Si(111) Surface by RF-N2 Plasma Nitriding. Coatings. 2021; 11(1):2.
https://doi.org/10.3390/coatings11010002
Chicago/Turabian Style
Chen, Wei-Chun, Sheng Chen, Tung-Yuan Yu, James Su, Hung-Pin Chen, Yu-Wei Lin, and Chin-Pao Cheng.
2021. "Growth of Si3N4 Thin Films on Si(111) Surface by RF-N2 Plasma Nitriding" Coatings 11, no. 1: 2.
https://doi.org/10.3390/coatings11010002
APA Style
Chen, W.-C., Chen, S., Yu, T.-Y., Su, J., Chen, H.-P., Lin, Y.-W., & Cheng, C.-P.
(2021). Growth of Si3N4 Thin Films on Si(111) Surface by RF-N2 Plasma Nitriding. Coatings, 11(1), 2.
https://doi.org/10.3390/coatings11010002