Precise Layer Control of MoTe2 by Ozone Treatment
AbstractTransition metal dichalcogenides (TMDCs) demonstrate great potential in numerous applications. However, these applications require a precise control of layer thickness at the atomic scale. In this work, we present an in-situ study of the self-limiting oxidation process in MoTe2 by ozone (O3) treatment. A precise layer-by-layer control of MoTe2 flakes can be achieved via multiple cycles of oxidation and wet etching. The thinned MoTe2 flakes exhibit comparable optical properties and film quality to the pristine exfoliated ones. Besides, an additional p-type doping is observed after O3 oxidation. Such a p-doping effect converts the device properties of MoTe2 from electron-dominated to hole-dominated ambipolar characteristics. View Full-Text
Share & Cite This Article
Wang, Q.; Chen, J.; Zhang, Y.; Hu, L.; Liu, R.; Cong, C.; Qiu, Z.-J. Precise Layer Control of MoTe2 by Ozone Treatment. Nanomaterials 2019, 9, 756.
Wang Q, Chen J, Zhang Y, Hu L, Liu R, Cong C, Qiu Z-J. Precise Layer Control of MoTe2 by Ozone Treatment. Nanomaterials. 2019; 9(5):756.Chicago/Turabian Style
Wang, Qiyuan; Chen, Jing; Zhang, Youwei; Hu, Laigui; Liu, Ran; Cong, Chunxiao; Qiu, Zhi-Jun. 2019. "Precise Layer Control of MoTe2 by Ozone Treatment." Nanomaterials 9, no. 5: 756.
Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.