Next Article in Journal
Applying Aluminum–Vertically-Aligned Carbon Nanotube Forests Composites for Heat Dissipation
Previous Article in Journal
Biphenyl-Bridged Organosilica as a Precursor for Mesoporous Silicon Oxycarbide and Its Application in Lithium and Sodium Ion Batteries
Article Menu
Issue 5 (May) cover image

Export Article

Open AccessArticle

Precise Layer Control of MoTe2 by Ozone Treatment

State Key Laboratory of ASIC & System, School of Information Science and Technology, Fudan University, Shanghai 200433, China
*
Authors to whom correspondence should be addressed.
Nanomaterials 2019, 9(5), 756; https://doi.org/10.3390/nano9050756
Received: 23 April 2019 / Revised: 9 May 2019 / Accepted: 15 May 2019 / Published: 17 May 2019
  |  
PDF [9906 KB, uploaded 17 May 2019]
  |  

Abstract

Transition metal dichalcogenides (TMDCs) demonstrate great potential in numerous applications. However, these applications require a precise control of layer thickness at the atomic scale. In this work, we present an in-situ study of the self-limiting oxidation process in MoTe2 by ozone (O3) treatment. A precise layer-by-layer control of MoTe2 flakes can be achieved via multiple cycles of oxidation and wet etching. The thinned MoTe2 flakes exhibit comparable optical properties and film quality to the pristine exfoliated ones. Besides, an additional p-type doping is observed after O3 oxidation. Such a p-doping effect converts the device properties of MoTe2 from electron-dominated to hole-dominated ambipolar characteristics. View Full-Text
Keywords: MoTe2; ozone; self-limiting; layer thinning MoTe2; ozone; self-limiting; layer thinning
Figures

Figure 1

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
SciFeed

Share & Cite This Article

MDPI and ACS Style

Wang, Q.; Chen, J.; Zhang, Y.; Hu, L.; Liu, R.; Cong, C.; Qiu, Z.-J. Precise Layer Control of MoTe2 by Ozone Treatment. Nanomaterials 2019, 9, 756.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Nanomaterials EISSN 2079-4991 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top