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Precise Layer Control of MoTe2 by Ozone Treatment

State Key Laboratory of ASIC & System, School of Information Science and Technology, Fudan University, Shanghai 200433, China
Authors to whom correspondence should be addressed.
Nanomaterials 2019, 9(5), 756;
Received: 23 April 2019 / Revised: 9 May 2019 / Accepted: 15 May 2019 / Published: 17 May 2019
PDF [9906 KB, uploaded 17 May 2019]


Transition metal dichalcogenides (TMDCs) demonstrate great potential in numerous applications. However, these applications require a precise control of layer thickness at the atomic scale. In this work, we present an in-situ study of the self-limiting oxidation process in MoTe2 by ozone (O3) treatment. A precise layer-by-layer control of MoTe2 flakes can be achieved via multiple cycles of oxidation and wet etching. The thinned MoTe2 flakes exhibit comparable optical properties and film quality to the pristine exfoliated ones. Besides, an additional p-type doping is observed after O3 oxidation. Such a p-doping effect converts the device properties of MoTe2 from electron-dominated to hole-dominated ambipolar characteristics. View Full-Text
Keywords: MoTe2; ozone; self-limiting; layer thinning MoTe2; ozone; self-limiting; layer thinning

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Wang, Q.; Chen, J.; Zhang, Y.; Hu, L.; Liu, R.; Cong, C.; Qiu, Z.-J. Precise Layer Control of MoTe2 by Ozone Treatment. Nanomaterials 2019, 9, 756.

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