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Journal: Nanomaterials, 2025
Volume: 15
Number: 1248
Article:
Effects of Hydrolysis Reaction and Abrasive Drag Force Accelerator on Enhancing Si-Wafer Polishing Rate and Improving Si-Wafer Surface Roughness
Authors:
by
Min-Uk Jeon, Pil-Su Kim, Man-Hyup Han, Se-Hui Lee, Hye-Min Lee, Su-Bin Kim, Jin-Hyung Park, Kyoo-Chul Cho, Jinsub Park and Jea-Gun Park
Link:
https://www.mdpi.com/2079-4991/15/16/1248
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