Article Versions Notes

Zhang K, Yu Y, Zhu N, Zhang S, Sun J, Ding S, Zhang DW. High-Performance and Fabrication-Tolerant 3 dB Adiabatic Coupler Based on Ultralow-Loss Silicon Waveguide by Tri-Layer Hard Mask Etching Process. Nanomaterials. 2025; 15(12):947. https://doi.org/10.3390/nano15120947

Zhang, Ke, Yunchu Yu, Nanfei Zhu, Senlin Zhang, Jie Sun, Shijin Ding, and David Wei Zhang. 2025. "High-Performance and Fabrication-Tolerant 3 dB Adiabatic Coupler Based on Ultralow-Loss Silicon Waveguide by Tri-Layer Hard Mask Etching Process" Nanomaterials 15, no. 12: 947. https://doi.org/10.3390/nano15120947

Zhang, K., Yu, Y., Zhu, N., Zhang, S., Sun, J., Ding, S., & Zhang, D. W. (2025). High-Performance and Fabrication-Tolerant 3 dB Adiabatic Coupler Based on Ultralow-Loss Silicon Waveguide by Tri-Layer Hard Mask Etching Process. Nanomaterials, 15(12), 947. https://doi.org/10.3390/nano15120947