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Journal: Nanomaterials, 2023
Volume: 13
Number: 2187
Article:
Yttrium Doping Effects on Ferroelectricity and Electric Properties of As-Deposited Hf1−xZrxO2 Thin Films via Atomic Layer Deposition
Authors:
by
Youkyoung Oh, Seung Won Lee, Jeong-Hun Choi, Seung-Eon Ahn, Hyo-Bae Kim and Ji-Hoon Ahn
Link:
https://www.mdpi.com/2079-4991/13/15/2187
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