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Journal: NanomaterialsVolume: 13Number: 2187
Article: Yttrium Doping Effects on Ferroelectricity and Electric Properties of As-Deposited Hf1−xZrxO2 Thin Films via Atomic Layer Deposition
- Authors:
- Youkyoung Oh1,
- Seung Won Lee1 and
- Jeong-Hun Choi1
- et al.
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