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Journal: Nanomaterials, 2021
Volume: 11
Number: 3179
3179
Article: Metal-Assisted Chemical Etching for Anisotropic Deep Trenching of GaN Array
Authors: by Qi Wang, Kehong Zhou, Shuai Zhao, Wen Yang, Hongsheng Zhang, Wensheng Yan, Yi Huang and Guodong Yuan
Link: https://www.mdpi.com/2079-4991/11/12/3179

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