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Journal: Applied SciencesVolume: 9Number: 3100
Article: Numerical Study on Thermal Design of a Large-Area Hot Plate with Heating and Cooling Capability for Thermal Nanoimprint Lithography
  • Authors:
  • Gyujin Park1 and
  • Changhee Lee2,*
Link: https://www.mdpi.com/2076-3417/9/15/3100

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