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Journal: Appl. Sci., 2019
Volume: 9
Number: 3100
Article:
Numerical Study on Thermal Design of a Large-Area Hot Plate with Heating and Cooling Capability for Thermal Nanoimprint Lithography
Authors:
by
Gyujin Park and Changhee Lee
Link:
https://www.mdpi.com/2076-3417/9/15/3100
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