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Journal: Applied SciencesVolume: 8Number: 2539
Article: Uncertainty Evaluation for Measurements of Pitch Deviation and Out-of-Flatness of Planar Scale Gratings by a Fizeau Interferometer in Littrow Configuration
  • Authors:
  • Xin Xiong1,
  • Yuki Shimizu1,* and
  • Xiuguo Chen1,2
  • et al.
Link: https://www.mdpi.com/2076-3417/8/12/2539

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