In the semiconductor industry, positioning accuracy and acceleration are critical parameters. To improve the acceleration speed of a motor, this paper proposes the moving-coil maglev planar motor with a concentric winding structure. The coordinate system has been built for the multiple degrees of freedom movement system. The Lorenz force method has been applied to solve its electromagnetic model. The real-time solving of the generalized inverse matrix of factors can realize the decoupling of the winding current. When the maglev height changes, the electromagnetic force and torque decreases exponentially with the increase of the air gap. To decrease the influence on control system performance by the internal model change and the external disturbance, this paper proposes an improved active disturbance rejection control (ADRC) to design the controller. This new controller overcomes the jitter phenomenon due to the turning point for the traditional ADRC, thus it is more suitable for the maglev control system. The comparison between ADRC and the improved ADRC has been conducted, the result of which shows the improved ADRC has greater robustness.
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