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Journal: Applied SciencesVolume: 14Number: 7722
Article: POSS and PAG Dual-Containing Chemically Amplified Photoresists by RAFT Polymerization for Enhanced Thermal Performance and Acid Diffusion Inhibition
- Authors:
- Haimeng Yu†,
- Shaoshuai Liu† and
- Jia Tian*
- et al.
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