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Journal: Applied SciencesVolume: 13Number: 5708
Article: The Inverse Optimization of an Optical Lithographic Source with a Hybrid Genetic Algorithm
  • Authors:
  • Junbo Liu1,2,3,
  • Ji Zhou1,2 and
  • Dajie Yu1,2
  • et al.
Link: https://www.mdpi.com/2076-3417/13/9/5708

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