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Journal: Appl. Sci., 2023
Volume: 13
Number: 5708
Article:
The Inverse Optimization of an Optical Lithographic Source with a Hybrid Genetic Algorithm
Authors:
by
Junbo Liu, Ji Zhou, Dajie Yu, Haifeng Sun, Song Hu and Jian Wang
Link:
https://www.mdpi.com/2076-3417/13/9/5708
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