Liu, J.; Zhou, J.; Yu, D.; Sun, H.; Hu, S.; Wang, J.
The Inverse Optimization of an Optical Lithographic Source with a Hybrid Genetic Algorithm. Appl. Sci. 2023, 13, 5708.
https://doi.org/10.3390/app13095708
AMA Style
Liu J, Zhou J, Yu D, Sun H, Hu S, Wang J.
The Inverse Optimization of an Optical Lithographic Source with a Hybrid Genetic Algorithm. Applied Sciences. 2023; 13(9):5708.
https://doi.org/10.3390/app13095708
Chicago/Turabian Style
Liu, Junbo, Ji Zhou, Dajie Yu, Haifeng Sun, Song Hu, and Jian Wang.
2023. "The Inverse Optimization of an Optical Lithographic Source with a Hybrid Genetic Algorithm" Applied Sciences 13, no. 9: 5708.
https://doi.org/10.3390/app13095708
APA Style
Liu, J., Zhou, J., Yu, D., Sun, H., Hu, S., & Wang, J.
(2023). The Inverse Optimization of an Optical Lithographic Source with a Hybrid Genetic Algorithm. Applied Sciences, 13(9), 5708.
https://doi.org/10.3390/app13095708