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Journal: Appl. Sci., 2023
Volume: 13
Number: 2097
Article:
Reactive Ion Etching of X-Cut LiNbO3 in an ICP/TCP System for the Fabrication of an Optical Ridge Waveguide
Authors:
by
Andrei Kozlov, Dmitrii Moskalev, Uliana Salgaeva, Anna Bulatova, Victor Krishtop, Anatolii Volyntsev and Alexander Syuy
Link:
https://www.mdpi.com/2076-3417/13/4/2097
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