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Kozlov A, Moskalev D, Salgaeva U, Bulatova A, Krishtop V, Volyntsev A, Syuy A. Reactive Ion Etching of X-Cut LiNbO₃ in an ICP/TCP System for the Fabrication of an Optical Ridge Waveguide. Applied Sciences. 2023; 13(4):2097. https://doi.org/10.3390/app13042097

Kozlov, Andrei, Dmitrii Moskalev, Uliana Salgaeva, Anna Bulatova, Victor Krishtop, Anatolii Volyntsev, and Alexander Syuy. 2023. "Reactive Ion Etching of X-Cut LiNbO₃ in an ICP/TCP System for the Fabrication of an Optical Ridge Waveguide" Applied Sciences 13, no. 4: 2097. https://doi.org/10.3390/app13042097

Kozlov, A., Moskalev, D., Salgaeva, U., Bulatova, A., Krishtop, V., Volyntsev, A., & Syuy, A. (2023). Reactive Ion Etching of X-Cut LiNbO₃ in an ICP/TCP System for the Fabrication of an Optical Ridge Waveguide. Applied Sciences, 13(4), 2097. https://doi.org/10.3390/app13042097