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Journal: Appl. Sci., 2023
Volume: 13
Number: 10243

Article: System-Level Fault Diagnosis for an Industrial Wafer Transfer Robot with Multi-Component Failure Modes
Authors: by Inu Lee, Hyung Jun Park, Jae-Won Jang, Chang-Woo Kim and Joo-Ho Choi
Link: https://www.mdpi.com/2076-3417/13/18/10243

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