Imaging the Permittivity of Thin Film Materials by Using Scanning Capacitance Microscopy

Round 1

Reviewer 1 Report

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Comments for author File: Comments.pdf

Author Response

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Author Response File: Author Response.pdf

Reviewer 2 Report

The authors presented a method to image ε_r of thin film materials by using scanning capacitance microscope (SCM). This method combined the quantitative measurement by using SCM with the capacitance gradient-distance fitting curve to obtain the two dimensional ε_r image. 

Before reaching out the final decision, I strongly suggest the authors to address the following comments:

1. All equations related to numerical fitting must be written clearly and explained well. what is the data fitting technique used and why you chose it for such data, kindly justify

2.  I suggest that the authors explain in the introduction in the results section how the readers may benefit from this work in order to scan the permittivity for cylindrical objects. As such remark is very important in photonics in different applications for instance the following reference, it should mentioned. 

https://opg.optica.org/josab/abstract.cfm?uri=josab-32-6-1022

3. there are some parameters that affect on permittivity such as temperature, why this is not mentioned in the current work?

4. I have reviewed more than 20 MDPI articles, in terms of template, this article is messed up. Please follow the template literally 

Author Response

Please see the attachment.

Author Response File: Author Response.pdf

Round 2

Reviewer 2 Report

The authors have addressed our comments well. I recommend the paper for publication.