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Journal: Appl. Sci., 2022
Volume: 12
Number: 8003

Article: Maximizing the Productivity of Photolithography Equipment by Machine Learning Based on Time Analytics
Authors: by Juyoung Jung, Jin-Hwan Hong, Jeewoong Suk, Hyunsoon Park and Byoungdeog Choi
Link: https://www.mdpi.com/2076-3417/12/16/8003

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