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Journal: Applied SciencesVolume: 12Number: 8003
Article: Maximizing the Productivity of Photolithography Equipment by Machine Learning Based on Time Analytics
  • Authors:
  • Juyoung Jung1,2,
  • Jin-Hwan Hong3 and
  • Byoungdeog Choi4,*
  • et al.
Link: https://www.mdpi.com/2076-3417/12/16/8003

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