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MDPIMDPI
Journal: ActuatorsVolume: 12Number: 337
Article: A Method for Improving Heat Dissipation and Avoiding Charging Effects for Cavity Silicon-on-Glass Structures
  • Authors:
  • Junduo Wang1,2,
  • Yuwei Hu1,2 and
  • Wenjiang Shen2,*
  • et al.
Link: https://www.mdpi.com/2076-0825/12/8/337

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