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Journal: Actuators, 2023
Volume: 12
Number: 48

Article: Experimental Study and Simulation of Pull-In Behavior in Hybrid Levitation Microactuator for Square-Shaped Proof Masses
Authors: by Emil R. Mamleyev, Chun Him Lee, Jan G. Korvink, Manfred Kohl and Kirill V. Poletkin
Link: https://www.mdpi.com/2076-0825/12/2/48

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