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Journal: ActuatorsVolume: 12Number: 48
Article: Experimental Study and Simulation of Pull-In Behavior in Hybrid Levitation Microactuator for Square-Shaped Proof Masses
  • Authors:
  • Emil R. Mamleyev1,*,
  • Chun Him Lee1 and
  • Jan G. Korvink1
  • et al.
Link: https://www.mdpi.com/2076-0825/12/2/48

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