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Journal: MachinesVolume: 11Number: 611
Article: Comparative Evaluation of High-Speed Bearingless Cross-Flow Fan Designs for Lithography Excimer Lasers
  • Authors:
  • Ivana Bagaric1,*,
  • Rennan Hu2 and
  • Daniel Steinert2
  • et al.
Link: https://www.mdpi.com/2075-1702/11/6/611

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