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Journal: Machines, 2023
Volume: 11
Number: 611
Article:
Comparative Evaluation of High-Speed Bearingless Cross-Flow Fan Designs for Lithography Excimer Lasers
Authors:
by
Ivana Bagaric, Rennan Hu, Daniel Steinert, Thomas Nussbaumer and Johann Walter Kolar
Link:
https://www.mdpi.com/2075-1702/11/6/611
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