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Journal: Crystals, 2019
Volume: 9
Number: 554
554
Article: Structural and Electrical Parameters of ZnO Thin Films Grown by ALD with either Water or Ozone as Oxygen Precursors
Authors: by Aleksandra Seweryn, Rafal Pietruszka, Bartlomiej S. Witkowski, Aleksandra Wierzbicka, Rafal Jakiela, Piotr Sybilski and Marek Godlewski
Link: https://www.mdpi.com/2073-4352/9/11/554

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