Scanning Electron Microscopy Investigation of Surface Acoustic Wave Propagation in a 41° YX-Cut of a LiNbO3 Crystal/Si Layered Structure

Roshchupkin, Dmitry; Emelin, Evgenii; Plotitcina, Olga; Mololkin, Anatoly; Telminov, Oleg

doi:10.3390/cryst11091082

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Scanning Electron Microscopy Investigation of Surface Acoustic Wave Propagation in a 41° YX-Cut of a LiNbO₃ Crystal/Si Layered Structure

by

Dmitry Roshchupkin

^1,*

,

Evgenii Emelin

¹,

Olga Plotitcina

¹,

Anatoly Mololkin

¹ and

Oleg Telminov

²

¹

Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences, Academician Ossipyan St. 6, 142432 Chernogolovka, Russia

²

Molecular Electronics Research Institute, 124460 Moscow, Russia

^*

Author to whom correspondence should be addressed.

Crystals 2021, 11(9), 1082; https://doi.org/10.3390/cryst11091082

Submission received: 22 July 2021 / Revised: 25 August 2021 / Accepted: 31 August 2021 / Published: 6 September 2021

(This article belongs to the Special Issue Ferroelectric and Piezoelectric Crystals)

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Abstract

The propagation process of the surface acoustic waves (SAW) and the pseudo-surface acoustic waves (PSAW) in a bonded layered structure of a 41° YX-cut of a LiNbO₃ crystal/Si(100) crystal was investigated. The scanning electron microscopy (SEM) method,in the low-energy secondary electrons registration mode, made it possible to visualize the SAW and PSAW in the LiNbO₃/Si layered structure. The process of the SAW and PSAW propagation in a LiNbO₃/Si layered structure and in a bulk 41° YX-cut of a LiNbO₃ crystal were compared. It was demonstrated that the SAW velocities in the layered LiNbO₃/Si structure exceed the typical SAW velocities for LiNbO₃ and Si single crystals. In the layered structure, the SAW and PSAW velocities were 4062 m/s, 4731 m/s, and 5871 m/s. It was also demonstrated that the PSAW velocities are the same in the LiNbO₃/Si layered structure and in the bulk 41° YX-cut of a LiNbO₃ crystal.

Keywords: LiNbO₃ crystal; Si crystal; surface acoustic wave; X-ray diffraction; scanning electron microscopy; LiNbO₃/Si layered structure

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MDPI and ACS Style

Roshchupkin, D.; Emelin, E.; Plotitcina, O.; Mololkin, A.; Telminov, O. Scanning Electron Microscopy Investigation of Surface Acoustic Wave Propagation in a 41° YX-Cut of a LiNbO₃ Crystal/Si Layered Structure. Crystals 2021, 11, 1082. https://doi.org/10.3390/cryst11091082

AMA Style

Roshchupkin D, Emelin E, Plotitcina O, Mololkin A, Telminov O. Scanning Electron Microscopy Investigation of Surface Acoustic Wave Propagation in a 41° YX-Cut of a LiNbO₃ Crystal/Si Layered Structure. Crystals. 2021; 11(9):1082. https://doi.org/10.3390/cryst11091082

Chicago/Turabian Style

Roshchupkin, Dmitry, Evgenii Emelin, Olga Plotitcina, Anatoly Mololkin, and Oleg Telminov. 2021. "Scanning Electron Microscopy Investigation of Surface Acoustic Wave Propagation in a 41° YX-Cut of a LiNbO₃ Crystal/Si Layered Structure" Crystals 11, no. 9: 1082. https://doi.org/10.3390/cryst11091082

APA Style

Roshchupkin, D., Emelin, E., Plotitcina, O., Mololkin, A., & Telminov, O. (2021). Scanning Electron Microscopy Investigation of Surface Acoustic Wave Propagation in a 41° YX-Cut of a LiNbO₃ Crystal/Si Layered Structure. Crystals, 11(9), 1082. https://doi.org/10.3390/cryst11091082

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Scanning Electron Microscopy Investigation of Surface Acoustic Wave Propagation in a 41° YX-Cut of a LiNbO₃ Crystal/Si Layered Structure

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