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Micromachines2018, 9(5), 233;https://doi.org/10.3390/mi9050233

Journal: MicromachinesVolume: 9Number: 233

Article: Acceleration Sensitivity in Bulk-Extensional Mode, Silicon-Based MEMS Oscillators

Authors:
Beheshte Khazaeili^1,*,
Jonathan Gonzales² and
Reza Abdolvand¹

Link: https://www.mdpi.com/2072-666X/9/5/233

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