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Journal: MicromachinesVolume: 8Number: 211
Article: DC Microplasma Jet for Local a:C-H Deposition Operated in SEM Chamber
  • Authors:
  • Khanit Matra1,
  • Hiroshi Furuta2,3 and
  • Akimitsu Hatta2,3,*
Link: https://www.mdpi.com/2072-666X/8/7/211

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