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Journal: MicromachinesVolume: 7Number: 187
Article: Design Optimization and Fabrication of High-Sensitivity SOI Pressure Sensors with High Signal-to-Noise Ratios Based on Silicon Nanowire Piezoresistors
- Authors:
- Jiahong Zhang1,2,3,*,
- Yang Zhao3 and
- Yixian Ge1,2,3
- et al.
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