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Journal: MicromachinesVolume: 15Number: 1017
Article: A Large-Scan-Range Electrothermal Micromirror Integrated with Thermal Convection-Based Position Sensors
- Authors:
- Anrun Ren1,2,
- Yingtao Ding1,2 and
- Hengzhang Yang1,2
- et al.
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