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Journal: MicromachinesVolume: 14Number: 846
Article: Inductively Coupled Plasma Dry Etching of Silicon Deep Trenches with Extremely Vertical Smooth Sidewalls Used in Micro-Optical Gyroscopes
  • Authors:
  • Yuyu Zhang1,
  • Yu Wu1 and
  • Quanquan Sun2
  • et al.
Link: https://www.mdpi.com/2072-666X/14/4/846

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