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Journal: MicromachinesVolume: 13Number: 676
Article: Ultra-Low-Voltage Capacitive Micromachined Ultrasonic Transducers with Increased Output Pressure Due to Piston-Structured Plates
  • Authors:
  • Fabian Merbeler1,2,*,
  • Sonja Wismath1 and
  • Marco Haubold3
  • et al.
Link: https://www.mdpi.com/2072-666X/13/5/676

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