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Micromachines2022, 13(2), 259;https://doi.org/10.3390/mi13020259

Journal: MicromachinesVolume: 13Number: 259

Article: An Endpoint Detection System for Ion Beam Etching Using Optical Emission Spectroscopy

Authors:
Junjie Zhang^1,2,†,
Jiahui Luo^1,2,† and
Xudong Zou^1,2
et al.

Link: https://www.mdpi.com/2072-666X/13/2/259

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