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Journal: MicromachinesVolume: 12Number: 1176
Article: Automated Filling of Dry Micron-Sized Particles into Micro Mold Pattern within Planar Substrates for the Fabrication of Powder-Based 3D Microstructures
- Authors:
- Cris Kostmann1,
- Thomas Lisec2,* and
- Mani Teja Bodduluri2
- et al.
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