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Journal: MicromachinesVolume: 10Number: 6
Article: Process Variability—Technological Challenge and Design Issue for Nanoscale Devices
  • Authors:
  • Jürgen Lorenz1,*,
  • Eberhard Bär1 and
  • Sylvain Barraud2
  • et al.
Link: https://www.mdpi.com/2072-666X/10/1/6

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