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Journal: Micromachines, 2018
Volume: 9
Number: 496
Article:
Post-Release Deformation and Motion Control of Photonic Waveguide Beams by Tuneable Electrothermal Actuators in Thick SiO2
Authors:
by
Kai Wu and Marcel Tichem
Link:
https://www.mdpi.com/2072-666X/9/10/496
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