Post-Release Deformation and Motion Control of Photonic Waveguide Beams by Tuneable Electrothermal Actuators in Thick SiO2
Wu, K.; Tichem, M. Post-Release Deformation and Motion Control of Photonic Waveguide Beams by Tuneable Electrothermal Actuators in Thick SiO2. Micromachines 2018, 9, 496. https://doi.org/10.3390/mi9100496
Wu K, Tichem M. Post-Release Deformation and Motion Control of Photonic Waveguide Beams by Tuneable Electrothermal Actuators in Thick SiO2. Micromachines. 2018; 9(10):496. https://doi.org/10.3390/mi9100496
Chicago/Turabian StyleWu, Kai, and Marcel Tichem. 2018. "Post-Release Deformation and Motion Control of Photonic Waveguide Beams by Tuneable Electrothermal Actuators in Thick SiO2" Micromachines 9, no. 10: 496. https://doi.org/10.3390/mi9100496