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Micromachines 2016, 7(8), 132;

Characterization of a Laterally Oscillating Microresonator Operating in the Nonlinear Region

Department of Mechanical and Aerospace Engineering, Hong Kong University of Science and Technology, 1 Clear Water Bay Road, Kowloon, Hong Kong, China
These authors contributed equally to this work.
Author to whom correspondence should be addressed.
Academic Editors: Behraad Bahreyni and Nam-Trung Nguyen
Received: 18 March 2016 / Revised: 24 June 2016 / Accepted: 25 July 2016 / Published: 2 August 2016
(This article belongs to the Special Issue Microresonators)
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Microresonators are popular structures used in a variety of applications. They generally operate in the linear region where the vibration amplitude is limited, thereby limiting the signal-to-noise ratio. The nonlinear vibration region, where amplitudes and, consequently, the signal-to-noise ratio are relatively large, is generally avoided owing to instabilities and complexities in analysing the vibrations. In this work, a nonlinear dynamic model with a damping constant obtained from Monte Carlo simulation was derived to describe the vibration responses of microresonators operating in the nonlinear region. A laterally oscillating comb-drive driven resonator was designed, fabricated and characterized at various pressures and driving signals to validate the model. A simple method to extract the quality factor of the resonator in the nonlinear region was also proposed. The measured quality factors were compared with those obtained from the nonlinear model and a good agreement was obtained. View Full-Text
Keywords: microresonators; nonlinear modelling; air damping; pressure sensing microresonators; nonlinear modelling; air damping; pressure sensing

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Ramanan, A.; Teoh, Y.X.; Ma, W.; Ye, W. Characterization of a Laterally Oscillating Microresonator Operating in the Nonlinear Region. Micromachines 2016, 7, 132.

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