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Journal: Micromachines, 2016
Volume: 7
Number: 74
Article:
A CMOS MEMS Humidity Sensor Enhanced by a Capacitive Coupling Structure
Authors:
by
Jian-Qiu Huang, Baoye Li and Wenhao Chen
Link:
https://www.mdpi.com/2072-666X/7/5/74
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