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Innovative SU-8 Lithography Techniques and Their Applications
 
 

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Journal: Micromachines, 2015
Volume: 6
Number: 252

Article: Performance of SU-8 Membrane Suitable for Deep X-Ray Grayscale Lithography
Authors: by Harutaka Mekaru
Link: https://www.mdpi.com/2072-666X/6/2/252

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