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Journal: MicromachinesVolume: 16Number: 993
Article: Development of Amorphous AlN Thin Films on ITO-Glass and ITO-PET at Low Temperatures by RF Sputtering
  • Authors:
  • Miriam Cadenas1,*,
  • Michael Sun1 and
  • Susana Fernández2
  • et al.
Link: https://www.mdpi.com/2072-666X/16/9/993

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