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Journal: Micromachines, 2025
Volume: 16
Number: 993
Article:
Development of Amorphous AlN Thin Films on ITO-Glass and ITO-PET at Low Temperatures by RF Sputtering
Authors:
by
Miriam Cadenas, Michael Sun, Susana Fernández, Sirona Valdueza-Felip, Ana M. Diez-Pascual and Fernando B. Naranjo
Link:
https://www.mdpi.com/2072-666X/16/9/993
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